- Guangzhou Doppler | PAUT Detector | Ultrasonic Probe | SAM | Automated Testing System | CT Inspection System

Amid the booming development of semiconductors, flat panel displays and solar cells, sputtering targets are core materials critical to product performance and reliability. We launch a new-generation automated inspection system, setting a new quality benchmark for the industry with superior performance and advanced technology.
Integrated with high-precision sensors, actuators and data processing units, the system enables full automation of testing, data collection, processing and analysis. It simulates real service environments and adopts advanced automation and nondestructive testing technologies to comprehensively detect internal defects like impurities and cracks, ensuring target quality complies with relevant standards.

Product Advantages

Durable and rugged

High-strength structured water tank stays undeformed and maintains high precision in long-term use.

Efficient Operation

Direct-driven linear motor: wear-free, high-speed, high-precision, long-lasting.

Precise Detection

High-resolution encoder enables real-time position feedback for precise detection.

Easy operation

Handwheel inching enables easy adjustment for simpler ultrasonic tuning.

Stable and reliable.

High anti-interference electrical design plus premium components ensure stable system operation.

Flexible Upgrades

Modular design eases maintenance and supports future upgrades.

Testing Cases

Defect signal for flat-bottomed hole in copper stepped test block: φ0.4 - φ0.8 - φ1.2 (depth 30.56mm)

Defect signal at the φ1mm interface of the steel-copper test block

Aluminum alloy flat bottom hole inspection effect

Product Parameters

Parameter	Small Sink	Medium Sink	Large Sink
External dimensions: Width * Depth * Height(mm)	1150 (including 1850 for the control panel) * 960 * 1550	1600 (including 1850 for the control panel) * 1500 * 2000	2000 (including 1850 for the control panel) * 1680 * 2000
XYZ axis travel	380mm350mm150mm	800mm600mm400mm	1200mm800mm400mm
水槽尺寸(X/Y/Z)	550mm530mm150mm	950mm750mm400mm	1350mm950mm400mm
XYZ axis speed	X/Y≥300mm/s, Z≥200mm/s	X/Y≥300mm/s, Z≥200mm/s	X/Y≥300mm/s, Z≥200mm/s
XYZ axis module repeatability	≤0.05mm	≤0.05mm	≤0.05mm
Motor type	Mitsubishi Servo	Mitsubishi Servo	Mitsubishi Servo
Industrial PC	17 (12th generation), 32GB RAM, 256GB SSD, 2TB HDD	17 (12th generation), 32GB RAM, 256GB SSD, 2TB HDD	17 (12th generation), 32GB RAM, 256GB SSD, 2TB HDD
Monitor	19.5-inch display	21.5-inch display	21.5-inch display
Waterway Design	Automatic water filling/drainage	Automatic water filling/water circulation/powered drainage	Automatic water filling/water circulation/powered drainage
Water circulation filtration system	none	have	have
Water pump drainage	none	have	have
Liquid level detection	have	have	have
Probe, Board	Optional	Optional	Optional
Weight	300KG (equipment)	600KG (equipment)	800KG (equipment)

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